Chemfluor 367 Fluoropolymer Tubing
Chemfluor® 367 is engineered for high-purity, superior surface smoothness and clarity
without compromising the properties of standard fluoropolymers.
Semiconductor manufacturers understand the importance of maintaining integrity of
the chemicals used in their production processes, and are using chemically inert
fluoropolymer tubings to achieve the required purity levels. Chemfluor® 367 Scientific
Grade tubing not only maintains fluid integrity, but outperforms tubings made from
standard or high-purity PFA resins in many significant ways.
In terms of surface smoothness, Chemfluor® 367 is up to six times smoother, which
translates to less cross-contamination, greater product yields and easier-to-clean
systems.
In extractable tests – in which several different fluoropolymer tubings were filled
separately with deionized water and acid - Chemfluor® 367 had one of the lowest
parts-per-billion counts on trace metals (“Comparative Total Trace Metal Extractables”
chart available upon request). As far as visual clarity is concerned, Chemfluor®
367 tubing is clearer than virtually all other fluoropolymers. Coupled with its
chemical inertness, this clarity makes Chemfluor® 367 ideally suited for easy identification
of just about any chemical.
Call 1.800.848.1141 for more info.
CMP Point of Use Chemical Dilution
Semiconductor manufacturing customers are seeking ways to reduce process costs without
impacting the process itself. Semiconductor production facilities have numerous
Chemical Mechanical Planarization (CMP) tools that use an abrasive process for polishing
the surface of the wafer flat. Planarization areas are opportunities to pursue such
improvements.
At various times during the CMP process, fluids are delivered to the wafer for polishing
or rinsing using a pressurized chemical system. During the rinse phase a chemical,
usually acid or ammonia, is diluted 40:1 with de-ionized (DI) water. McMillan Liquid
Flo-Controllers combine smart electronics with a precision control valve and flow
sensor. The output from the flow sensor is analyzed and compared to the flow rate
set point. The control valve is then automatically adjusted to achieve the required
flow.
The DI water and the chemical are mixed downstream of the Model U801 Flo-Controllers
and delivered to the wafer. The controller uses an external set-point, output signal
and standby mode for process control and monitoring. Standby mode overrides control
functions and freezes valve position, while still providing flow output signals
for monitoring purposes. Normal operation resumes when standby is disengaged.
The Liquid Flo-Controllers provide consistent flow regardless of small pressure
changes and can be configured for available system pressure. The control module
has an LCD display, status and standby LED indicators for visual reference. DIP
switches on the control module allow the user to view flow, choose internal or external
set-point and manually activate standby mode. Benefits to our customers include
a reduction in process cost, reduced maintenance and improved consistency.
Call 1.925.443-9800 for more information or to schedule a visit with a Microelectronics
sales representative.
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In this issue:
Download this Issue: OCTOBER
2007
Saint-Gobain Microelectronics manufactures custom fluoropolymer valve manifolds
to provide turn-key solutions to semiconductor OEMs.
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